IPEX-800
Industrial Excimer Lasers
High Duty Cycle, high power operation 24/7 with ultra low gas usage
IPEX-800 lasers combine the benefits of high precision excimer processing with the lowest total cost of ownership and highest uptime in the market today. The marking of ceramics shown above is one of many applications for these versatile industrial tools.
Features
exciPure™ technology for increddible 10X gas lifetimes and the lowest cost of operation
No expensive cryogenic gas purifier is required
EasyClean automated optics seals to retain gas fill and reduce downtime during optics maintenance
Optional High-Brightness optics for applications requiring low beam divergence or extended coherence length
High-stability optics mounts for ultimate beam pointing accuracy
Simple integration into industrial processing systems
Benefits
Extended gas lifetime, long replacement intervals, low operating cost
Simplifies optical maintenance, retains gas fill and passivation
Delivers 200 microradian pointing stability
No realignment required after cleaning or replacing optics
Fast, precise energy stabilization in internal, burst and external trigger modes
Excellent energy stability, better than 1.0% (KrF)
Removes particulates and maintains optics cleanliness
Applications
24/ 7 Pulsed Laser Deposition
Precision Manufacturing
Material Processing
Drilling
Wire Stripping
Scientific Research
LIDAR
Laser Induced Breakdown Spectroscopy
Specifications
| Wavelength | 193nm ArF | 248nm KrF | 308 XeCl | 351 XeF |
|---|---|---|---|---|
| Maximum Pulse Energy (mJ) IPEX-840 | 230 | 450 | 300 | 275 |
| Maximum Pulse Energy (mJ) IPEX-860 | 250 | 700 | 600 | 350 |
| Stabilized Pulse Energy (mJ) IPEX-840 | 150 | 400 | 250 | 225 |
| Stabilized Pulse Energy (mJ) IPEX-860 | 200 | 600 | 500 | 300 |
| Stabilized Average Power (W) | ||||
| IPEX-848 | 30 | 80 | 50 | 45 |
| IPEX-846 | 15 | 40 | 25 | 22 |
| IPEX-844 | 6 | 20 | 12 | 11 |
| IPEX-842 | 3 | 10 | 6 | 5.5 |
| IPEX-868 | 20 | 60 | 50 | 30 |
| IPEX-866 | 10 | 30 | 25 | 15 |
| IPEX-864 | 5 | 18 | 10 | 9 |
| IPEX-862 | 2.5 | 9 | 5 | 4.5 |
| Maximum Repetition Rate (Hz) | ||||
| IPEX-848 | 200 | 200 | 200 | 200 |
| IPEX-846 | 100 | 100 | 100 | 100 |
| IPEX-844 | 40 | 50 | 50 | 50 |
| IPEX-842 | 20 | 25 | 25 | 25 |
| IPEX-868 | 100 | 100 | 100 | 100 |
| IPEX-866 | 50 | 50 | 50 | 50 |
| IPEX-864 | 25 | 30 | 20 | 30 |
| IPEX-862 | 12 | 15 | 10 | 15 |
| Pulse Duration | 12 to 20 ns FWHM | |||
| Energy Stability, 1 Sigma | 1% (KrF) | |||
| Beam Dimensions (V x H) | IPEX-840 Series 12 x 26 mm | |||
| Beam Dimensions (V x H) | IPEX-860 Series 12 x 28 mm | |||
| Beam Divergence (V x H) | 1 x 3mrad or can be reduced to 0.25mrad with high brightness unstable resonator optics | |||
| Electrical Power Requirements | Single Phase, 200 - 240 V 50/60Hz; 8x6:2.5kW, 8x4:1.5kW. 8x2:1kW | |||
| Cooling Requirements | Optional air cooling to 25Hz operation, water cooling at higher rep rates | |||
| Laser Gas | Premix or individual cylinders | |||
| Weight | 8x8 models 400kg , 8x6/8x4/8x2 models: 380kg | |||
Specifica/ons are subject to change.
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