Features
TMC (Total-Metal-Ceramic) Vessel
Corona Preionization
Solid state switch
Extended Dynamic & Static Gas-Lifetime (Several Months)
Laser Head Volume 6 l
Air Cooled / Optional Liquid Cooled
RS-485, RS232, USB and fiber optic Interface for system integration
Flushable optics holder
Integrated 4-Valve System for Easy Gas Handling
Energy stabilization mode
Dynamic fan speed controls
Meets European CE-standard, RoHS compliant
Modular Design / Service Friendly
Specifications
| Model | ATLEX-500-L | ||
|---|---|---|---|
| Gas Medium | ArF | KrF | Units |
| Wavelength | 193 | 248 | nm |
| High Voltage Switching Technique | Solid State Switch | - | |
| Max. Pulse Energy 1 | 10 | 15 | mJ |
| Max. Average Power | 4.0 | 6.5 | W |
| Max. Rep Rate | 500 | Hz | |
| Pulse Duration 2 | 5 - 8 | ns | |
| Beam Dimensions 2 (V x H) | 6 x 4 | mm | |
| Beam Divergence 2 (V x H) | 2 x 1 | mrad | |
| Energy Stability (standard deviation) | < 2 | % | |
| Dimensions (L x W x H) | 600 x 415 x 567 | mm | |
| Weight | 70 | kg | |
| Cooling | Cooling Air / Optional Liquid | - | |
| Power requirement | 230 VAC / 10 A / 1 phase / 50-60 Hz | - | |
All specifications are typical data and subject to change without notice due to product improvements.
1 Measured at low rep.rates; allow 10% reduction of output energy and power for laser equipped with stabilization mode.
2 Typical value, FWHM
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