ATLEX-500-I
A new generation of compact air-cooled, high repetition rate excimer lasers, designed for low- and mid-range duty cycle applications
Features
Soft corona preionization
HV-solid state pulser
Laser head volume < 3l
TMC (Total-Metal-Ceramic) Vessel
Integrated vacuum pump & halogen filter
Air Cooled / Optional Liquid Cooled, active thermal management
Flushable optics holder
Energy stabilization mode
Dynamic fan speed controls
Meets European CE-standard
RoHS compliance
RS-485, RS232, USB and fiber optic Interface for system integration
Applications
Micromachining
Laser ablation
Medicine (refractive surgery)
Spectroscopy
Metrology
Specifications
| Model | ATLEX-500-I | |||||
|---|---|---|---|---|---|---|
| Gas Medium | F2 | ArF | KrF | XeCl | XeF | Units |
| Wavelength | 157 | 193 | 248 | 308 | 351 | nm |
| High Voltage Switching Technique | Solid State Switch | - | ||||
| Max. Pulse Energy 1 | 1 | 10 | 15 | 8 | 7 | mJ |
| Max. Average Power | 0.5 | 4.0 | 6.5 | 3 | 2.5 | W |
| Max. Rep Rate | 500 | Hz | ||||
| Pulse Duration 2 | 5 - 8 | ns | ||||
| Beam Dimensions 2 (V x H) | 4 x 6 | mm | ||||
| Beam Divergence 2 (V x H) | 1 x 2 | mrad | ||||
| Energy Stability (standard deviation) | < 3 | % | ||||
| Dimensions (L x W x H) | 540 x 470 x 370 | mm | ||||
| Weight | 60 | kg | ||||
| Cooling | Cooling Air / Optional Liquid | - | ||||
| Power requirement | 230 VAC / 6,3 A / 1 phase / 50-60 Hz | - | ||||
All specifications are typical data and subject to change without notice due to product improvements.
1 Measured at low rep.rates; allow 10% reduction of output energy and power for laser equipped with stabilization mode.
2 Typical value, FWHM
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