ATLEX-1000-I
The brand new 1kHz version of the field proven ATLEX-I laser
Features
Soft corona preionization
HV-solid state pulser
Laser head volume < 3l
TMC (Total-Metal-Ceramic) Vessel
Integrated vacuum pump & halogen filter
Air Cooled / Optional Liquid Cooled
Flushable optics holder
Energy stabilization mode
Dynamic fan speed controls
Meets European CE-standard
RoHS compliance
RS-485, RS232, USB and fiber optic Interface for system integration
Applications
Micromachining
Laser ablation
Medicine (refractive surgery)
Spectroscopy
Metrology
Specifications
| Model | ATLEX-1000-I | ||
|---|---|---|---|
| Gas Medium | ArF | KrF | Units |
| Wavelength | 193 | 248 | nm |
| High Voltage Switching Technique | Solid State Switch | - | |
| Max. Pulse Energy 1 | 10 | 15 | mJ |
| Max. Average Power | 8 | 10 | W |
| Max. Rep Rate | 1000 | Hz | |
| Pulse Duration 2 | 5 - 8 | ns | |
| Beam Dimensions 2 (V x H) | 4 x 6 | mm | |
| Beam Divergence 2 (V x H) | 1 x 2 | mrad | |
| Energy Stability (standard deviation) | < 3 | % | |
| Dimensions (L x W x H) | 540 x 470 x 370 | mm | |
| Weight | 60 | kg | |
| Cooling | Cooling Air / Optional Liquid | - | |
| Power requirement | 230 VAC / 10 A / 1 phase / 50-60 Hz | - | |
All specifications are typical data and subject to change without notice due to product improvements.
1 Measured at low rep.rates; allow 10% reduction of output energy and power for laser equipped with stabilization mode.
2 Typical value, FWHM
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