VOLCANO® 300UV Laser Optics
The VOLCANO® 300UV Laser Optics is built into a solid granite structure. Two laser beams can be combined to obtain high energy density. The beams are processed by independent telescopes and combined by a specially designed homogenizer. The combined laser beams are homogenized into a 300mm long line beam with a typical width of 20 - 30µm. The FALCON 300UV projection lens assures a uniform line width and the large depth of focus which trouble-free production requires.
Scope of Application
Laser-Lift-Off processes are in use in the electronics industry for the production of flexible OLED displays for TV products, smartphones, smartwatches and tablet computers. The OLED display is manufactured on a flexible polymer foil on a glass substrate. The final polymer foil with the OLED display is lifted off the glass using the UV laser line.
Specifications
| Technical Data VOLCANO® 300UV - 8320 | |
|---|---|
| Wavelength | 343 nm |
| Line length | 300mm (top-hat-profile) |
| Line width | 20µm FWHM (Gaussian profile) |
| Homogeneity | p2p ≤ 6% best focus |
| DoF | ≥ 140µm for p2p ≤ 10% |
| Energy density | ≥ 230mJ/cm² @ 20µm FWHM |
| Pulse duration | 15-20ns FWHM, can be extended by delay trigger scheme |
| Repetition rate | 10kHz |
| Laser | TruMicro 3820 (Trumpf Lasertechnik) |
| Diagnostics | laser power meter, substrate power meter, substrate beam profiler, fast photodiode |
| Technical Data VOLCANO® 300UV - 8340 | |
| Wavelength | 343 nm |
| Line length | 300mm (top-hat-profile) |
| Line width | 30µm FWHM (Gaussian profile) |
| Homogeneity | p2p ≤ 6% best focus |
| DoF | ≥ 300µm for p2p ≤ 10% |
| Energy density | 310mJ/cm² @ 30µm FWHM |
| Pulse duration | 15-20ns FWHM, can be extended by delay trigger scheme |
| Repetition rate | 10kHz |
| Laser | TruMicro 3840 (Trumpf Lasertechnik) |
| Diagnostics | laser power meter, substrate power meter, substrate beam profiler, fast photodiode |
Other line sizes and other configurations on request.
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