Laser Blade Debonder (LDB)
Fully automated LLO system
The LDB is optimized for High speed Laser Lift-Off (LLO) process independant of part size. This system combines a flexible workstation with an external laser associated to homogenizing optics to create a laser beam line for high troughput production.
The beam length is adjustable and automatically switchable in function of the application. Automation can be provided as an option with cassette or wafer loading including automated pre-alignment, robotics and machine vision.
Features
Motorized X,Y,Z axes
308nm laser wavelength
Up to 45mm beam line length
>600 mJ/cm2 on the part
Off axis vision
User friendly softwares
CAD compatible
All granite structure
Class 1 machine
Specifications
| Beam Delivery Unit | |
|---|---|
| Wavelength | 308 nm / Option: 248 nm |
| Energy density | From 50 to 600 mJ/cm2 / Option: Trade-off line beam length |
| Rep rate | max 200 Hz |
| Beam line length | 22 or 45 mm with 75 mm in option |
| Beam line widh | 1 or 1.2 mm |
| Depth of focus | > 0.5 mm |
| Focus Range | 25 mm / Option: Motorized |
| Attenuation range | from 5 to 100% |
| Part Positionning | |
| Processing area | 200 x 200 mm |
| Travel range | 450 x 300 mm |
| Resolution | 1 µm |
| Repeatability | < 2 µm |
| Absolutely accuracy | < 2 µm with DMC calibration |
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