[M-Solv]
MSV 2508 ITO and Thin film patterning tool

Description
The MSV 2508 ITO and thin film patterning tool is a high-specification production tool for step-and-scan thin film and ITO ablation or other laser patterning requirements for example on both sides of a flat panel display panel. This unique (patent pending) approach optimizes processing speed while minimizing footprint. Originally aimed at hand held flat panel display applications the tool can be used for a variety of ITO removal applications for Display and thin film photovoltaic applications.
Process
- UV Laser photoablation of material
- Single step, environmentally friendly, dry process
- Multiple beam scanners rapidly process one or both sides of substrate simultaneously
- 2 boards processed in parallel
- Each scan head processes up to 100 x 50mm field, suitable for hand held devices
- Step and scan direct write tiling operation
- Direct write, focussed spot operation
- Line-widths down to <10µm
- Dynamic focus compensation with fast optically adjusted Z axis
- Rapid and flexible change of circuit design or display design
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